ZrAlO ternary oxide as a candidate for high-k dielectrics

ZrAlO ternary oxide as a candidate for high-k dielectrics

M. Bizarro, J.C. Alonso, A. Ortiz
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Volume:
9
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.mssp.2006.10.028
File:
PDF, 192 KB
english, 2006
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