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High temperature characterization of high-κ dielectrics on SiC
M.H. Weng, R. Mahapatra, P. Tappin, B. Miao, S. Chattopadhyay, A.B. Horsfall, N.G. WrightVolume:
9
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mssp.2006.10.032
File:
PDF, 161 KB
english, 2006