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Investigation of strontium tantalate thin films for high-k gate dielectric applications
M. Silinskas, M. Lisker, B. Kalkofen, E.P. BurteVolume:
9
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2006.10.037
File:
PDF, 456 KB
english, 2006