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Optimization of electric properties of high-k zirconium dioxide by varying deposition and annealing conditions
M. Silinskas, M. Lisker, S. Matichyn, B. Kalkofen, E.P. BurteVolume:
9
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2006.10.038
File:
PDF, 368 KB
english, 2006