Impact of defects on the high-κ/MG stack: The electrical...

Impact of defects on the high-κ/MG stack: The electrical characterization challenge

Luigi Pantisano, L.-Å. Ragnarsson, M. Houssa, R. Degraeve, G. Groeseneken, T. Schram, S. Degendt, M. Heyns, V. Afanas’ev, A. Stesmans
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Volume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.10.048
File:
PDF, 181 KB
english, 2006
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