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Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient
Kyungsoo Jang, Kwangsoo Lee, Junsik Kim, Sunghyun Hwang, Jeongin Lee, Suresh Kumar Dhungel, Sungwook Jung, Junsin YiVolume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.10.052
File:
PDF, 488 KB
english, 2006