Effect of rapid thermal annealing of sputtered aluminium...

Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient

Kyungsoo Jang, Kwangsoo Lee, Junsik Kim, Sunghyun Hwang, Jeongin Lee, Suresh Kumar Dhungel, Sungwook Jung, Junsin Yi
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Volume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.10.052
File:
PDF, 488 KB
english, 2006
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