Polarity Dependence of the Conduction Mechanism in...

IEEE Electron Device Letters 2012 / 07 Vol. 33; Iss. 7

Polarity Dependence of the Conduction Mechanism in Interlevel Low-$k$ Dielectrics

Lin, Mingte, Liang, James, Wang, C. J., Juan, Alex, Su, K. C.
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Volume:
33
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2012.2196967
Date:
July, 2012
File:
PDF, 362 KB
english, 2012
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