Silicon-nitride as a tunnel dielectric for improved...

IEEE Electron Device Letters 2003 / 05 Vol. 24; Iss. 5

Silicon-nitride as a tunnel dielectric for improved SONOS-type flash memory

Min She,, Takeuchi, H., Tsu-Jae King,
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Volume:
24
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2003.812547
Date:
May, 2003
File:
PDF, 246 KB
english, 2003
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