Ion-Bombarded and Plasma-Passivated Charge Storage Layer...

IEEE Transactions on Electron Devices 2014 / 9 Vol. 61; Iss. 9

Ion-Bombarded and Plasma-Passivated Charge Storage Layer for SONOS-Type Nonvolatile Memory

Liu, Sheng-Hsien, Wu, Chi-Chang, Yang, Wen-Luh, Lin, Yu-Hsien, Chao, Tien-Sheng
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2014.2341629
Date:
September, 2014
File:
PDF, 3.15 MB
english, 2014
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