System-level simulation and implementation for a high Q...

Microsystem Technologies 2015 / 10 Vol. 21; Iss. 10

System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation

Song, Zhaohui, Sun, Teng, Wu, Jian, Che, Lufeng
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Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2315-4
Date:
October, 2015
File:
PDF, 2.07 MB
english, 2015
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