Volume 21; Issue 10

Microsystem Technologies

Volume 21; Issue 10
1

Vibratory ring six-axis motion sensor

Year:
2015
Language:
english
File:
PDF, 2.38 MB
english, 2015
3

Novel design concept of torsional gyroscope with robust drive mode and its implementation

Year:
2015
Language:
english
File:
PDF, 1.27 MB
english, 2015
7

Low cost packaging for gas sensors

Year:
2015
Language:
english
File:
PDF, 981 KB
english, 2015
8

A low insertion loss, multi-band, fixed central capacitor based RF-MEMS switch

Year:
2015
Language:
english
File:
PDF, 1012 KB
english, 2015
9

A low-power, micromachined, double spiral hotplate for MEMS gas sensors

Year:
2015
Language:
english
File:
PDF, 1.39 MB
english, 2015
23

Research development of silicon MEMS gyroscopes: a review

Year:
2015
Language:
english
File:
PDF, 2.70 MB
english, 2015