Self-aligned silicided (PtSi and CoSi2) ultra-shallow p+/n junctions
Broadbent, E.K., Delfino, M., Morgan, A.E., Sadana, D.K., Maillot, P.Volume:
8
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/edl.1987.26644
Date:
July, 1987
File:
PDF, 409 KB
english, 1987