Gettering Technology Based on Porous Silicon

Solid State Phenomena 2002 Vol. 82-84

Gettering Technology Based on Porous Silicon

Lamedica, G., Balucani, Marco, Ferrari, A., Bondarenko, V., Yakovtseva, V., Dolgyi, L.
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Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.82-84.405
File:
PDF, 442 KB
2002
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