Volume 82-84

Solid State Phenomena

Volume 82-84

1

Electrical Effects of Point Defect Clouds at Dislocations in Silicon, Studied by Deep Level Transient Spectroscopy

Schröter, Wolfgang, Kveder, Vitaly, Hedemann, Henrik

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 447 KB

2002

2

Thermal Evolution of Extrinsic Defects in Ion Implanted Silicon: Current Understanding and Modelling

Cristiano, Fuccio, Colombeau, B., Bonafos, C., Altibelli, A., Benassayag, G., Claverie, A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 421 KB

2002

3

Gettering Technology Based on Porous Silicon

Lamedica, G., Balucani, Marco, Ferrari, A., Bondarenko, V., Yakovtseva, V., Dolgyi, L.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 442 KB

2002

4

Radiation Defects and Carrier Lifetime in Tin-Doped n-Type Silicon

Simoen, Eddy, Claeys, C., Kraitchinskii, A., Kras'ko, M., Neimash, V.B., Shpinar, L.I.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 371 KB

2002

5

Radiation Damage in MOS Structures, Irradiated with High-Energy Heavy Ions and Fast Neutrons, with Regard to Charge DLTS and C-V Measurements

Staňo, J., Skuratov, V.A., Žiška, M.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 362 KB

2002

6

Radiation-Induced Electronic Defect Levels in High-Resistivity Si Detectors

Monakhov, Edouard V., Avset, B.S., Hallén, Anders, Svensson, Bengt G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 476 KB

2002

7

Characterisation of Surface and Near-Surface Regions in High-Purity Cz Si

Castaldini, Antonio, Cavalcoli, Daniela, Cavallini, Anna, Minarelli, T., Susi, E.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 327 KB

2002

8

Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon

Tonini, R., Corni, F., Nobili, C., Ottaviani, G., Cazzaniga, F., Queirolo, G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 506 KB

2002

9

Characterization of Interfacial States at Silicon Bicrystals

Kamaev, G.N., Golod, S.V., Skok, E.M., Fedotov, A.K., Mazanik, A.V.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 458 KB

2002

10

Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p+ Epitaxial Wafers

Shabani, Mohammad B., Shiina, Y., Shimanuki, S., Kirscht, F.G.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 495 KB

english, 2002

11

Gettering Induced by Helium Implantation: Application to a Device

Roqueta, F., Alquier, Daniel, Ventura, Laurent, Lopez, B.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 575 KB

2002

12

Study of Relaxed Si0.7Ge0.3 Buffers, Grown on Patterned Silicon Substrates, by Raman Spectroscopy

Wöhl, G., Kasper, Erich, Klose, M., Hackbarth, T., Herzog, H.-J., Kibbel, H.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 470 KB

2002

13

Infra Red Absorption by Hydrogen-Passivated Cracks in Silicon

Kilanov, D.V., Safronov, L.N., Popov, V.P.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 317 KB

2002

14

Silicon Isotope Shifts of the 648-cm-1 Infrared Absorption Line of Oxygen in Silicon

Yamada-Kaneta, Hiroshi

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 319 KB

2002

15

Carbon-Oxygen-Related Complexes in Irradiated and Heat-Treated Silicon: IR Absorption Studies

Murin, L.I., Markevich, V.P., Lindström, J. Lennart, Kleverman, Mats, Hermansson, J., Hallberg, T., Svensson, Bengt G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 407 KB

2002

16

Three-Dimensional Emitter Based on Locally Enhanced Diffusion (TREBLE) Structure: Modeling and Formation

Bourdais, S., Slaoui, A., Beaucarne, G., Poortmans, J., Christoffel, E., Zerga, A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 408 KB

2002

17

Crystalline Silicon for Solar Cells

Kittler, Martin, Koch, Wolfgang

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 485 KB

2002

18

Properties of Silicon Film in a Silicon-on-Glass Structure

Kilanov, D.V., Antonova, I.V., Safronov, L.N., Popov, V.P., Obodnikov, V.I., Spesivtsev, E.V.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 333 KB

2002

19

Helium Bubble Growth in Silicon: Ripening or Bubble Motion and Coalescence?

Vishnyakov, V.M., Donnelly, S.E., Carter, G., Birtcher, R.C., Haworth, L.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 409 KB

2002

20

Suppression of Boron Transient Enhanced Diffusion by C Trapping

Mirabella, S., Coati, A., Scalese, S., De Salvador, D., Pulvirenti, S., Bisognin, G., Napolitani, E., Terrasi, A., Berti, M., Carnera, A., Drigo, A.V., Priolo, F.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 427 KB

2002

21

Effective Gettering Mechanisms in Solar Multicrystalline Materials

Efremov, A.A., Evtukh, A., Klyui, N.I., Litovchenko, V.G., Popov, V., Rassamakin, Yu., Sarikov, A.V., Häßler, C., Koch, Wolfgang

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 346 KB

2002

22

Infrared Absorption Analysis of Nitrogen in Czochralski Silicon

Yamanaka, Y., Harada, Hiroshi, Tanahashi, K., Mikayama, T., Inoue, N.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 321 KB

2002

23

Void Shrinkage during Thermal Oxidation of Silicon

Raineri, Vito, Giuffrida, Stella, Rimini, Emanuele

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 538 KB

2002

24

Oxygen Precipitation in Silicon Doped with Tin

Khirunenko, L.I., Pomozov, Yu.V., Sosnin, M.G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 279 KB

2002

25

Modeling of Impurity Transport and Point Defect Formation during Cz Si Crystal Growth

Kalaev, V.V., Zabelin, V.A., Makarov, Yuri N.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 462 KB

2002

26

Comparison of Nickel and Iron Gettering in Cz Silicon Wafers

Kirscht, F.G., Orschel, B., Rouvimov, S., Shabani, M.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 288 KB

2002

27

Blue-Green Photoluminescence from Silicon Dioxide Films Containing Ge+ Nanocrystals Formed under Conditions of High Hydrostatic Pressure Annealing

Tyschenko, I.E., Rebohle, L., Talochkin, A.B., Kolesov, B.A., Voelskow, M., Misiuk, Andrzej, Skorupa, Wolfgang

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 342 KB

2002

28

Nanocrystal MOS Memories Obtained by LPCVD Deposition of Si Nanograins

Vulpio, M., Gerardi, C., Lombardo, Salvatore, Ammendola, G., Crupi, I., Rossetti, T., Nastasi, N., Mantarro, G., Nicotra, G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 406 KB

2002

29

Hydrostatic Pressure Effect on Redistribution of Oxygen Atoms in Oxygen-Implanted Silicon

Misiuk, Andrzej, Barcz, Adam, Ratajczak, Jacek, Antonova, I.V., Jun, J.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 786 KB

2002

30

Oxygen Annealing Behavior in Multicrystalline Silicon

Yang, De Ren, Möller, Hans Joachim

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 395 KB

2002

31

Defect Engineering in the Technology of Light-Emitting Structures Based on Monocrystalline Si Implanted with Rare Earth Ions

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 385 KB

2002

32

Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers

Shimura, Takayoshi, Hosoi, Takuji, Fukuda, Kazunori, Umeno, Masataka

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 471 KB

2002

33

Precipitation Kinetics and Recombination Activity of Cu in Si in the Presence of Internal Gettering Sites

Istratov, Andrei A., Sachdeva, R., Flink, C., Balasubramanian, S., Weber, Eicke R.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 565 KB

english, 2002

34

Efficiency of Intrinsic Gettering for Copper in Silicon

Isomae, Seiichi, Ishida, Hidetsugu, Itoga, Toshihiko, Hozawa, Kazuyuki

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 377 KB

2002

35

Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers

Karoui, A., Karoui, F.S., Yang, De Ren, Rozgonyi, George A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 759 KB

2002

36

Diffusion Coefficient and Equilibrium Concentration of Point Defects in Silicon Crystals, Estimated via Grown-in Defect Behavior

Nakamura, Kozo, Saishoji, Toshiaki, Tomioka, Junsuke

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 582 KB

english, 2002

37

Gold Gettering by H+ or He++ Ion Implantation Induced Cavities and Defects in Cz Silicon Wafers

Périchaud, Isabelle, Yakimov, E.B., Martinuzzi, Santo, Dubois, Christiane

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 425 KB

2002

38

Radiation Damage in npn Si Transistors due to High-Temperature Gamma Ray and 1-MeV Electron Irradiation

Ohyama, H., Hirao, Toshio, Simoen, Eddy, Claeys, C., Nakabayashi, Masashi, Onoda, S.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 383 KB

2002

39

The Effects of Impurities on Extended Defects in Cz Silicon Crystals Grown under Interstitial-Rich Conditions

Terashima, Kazutaka, Noguchi, Hajime

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 506 KB

2002

40

Orthogonal Defect Solutions for Silicon Crystal Growth and Wafer Processing

Falster, Robert

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 674 KB

english, 2002

41

Formation of Shallow Donors in Stress-Annealed Silicon Implanted with High-Energy Ions

Antonova, I.V., Neustroev, E.P., Misiuk, Andrzej, Skuratov, V.A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 363 KB

2002

42

Hydrogen-Related Defects in High-Resistivity Silicon

Soltanovich, O.A., Feklisova, O.V., Yakimov, E.B.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 345 KB

2002

43

Defects in CdTe Induced by Powerful Laser Radiation

Korbutyak, D.V., Krylyuk, S.G., Kupchak, I.M., Litovchenko, V.G., Fedorenko, L.L., Medvid, Arthur, Hatanaka, Y.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 322 KB

2002

44

Electrical Activity of Dislocations in Si Decorated by Ni

Kveder, Vitaly, Schröter, Wolfgang, Seibt, Michael, Sattler, Andreas

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 490 KB

2002

45

Vibrational Modes of Oxygen Dimers in Germanium

Litvinov, V.V., Murin, L.I., Lindström, J. Lennart, Markevich, V.P., Klechko, A.A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 422 KB

2002

46

Hydrogen Interaction with Transition Metals in Silicon, Studied by Electron Paramagnetic Resonance

Huy, P.T., Ammerlaan, C.A.J.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 422 KB

2002

47

Impact of High-Energy Particle Irradiation on Polycrystalline Silicon Films

Nakabayashi, Masashi, Ohyama, H., Simoen, Eddy, Claeys, C., Tanaka, K., Kobayashi, K., Miyahara, K.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 413 KB

2002

48

The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process

Binns, M.J., Banerjee, A., Wise, R., Myers, D.J., McKenna, T.A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 444 KB

2002

49

Influence of Depth in Helium Desorption from Cavities Induced by 3He Implantation in Silicon

Delamare, R., Ntsoenzok, E., Labohm, F., van Veen, A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 291 KB

2002

50

Minority Carrier Diffusion Lengths in Silicon Doped Gallium Nitride Thin Films Measured by Electron Beam Induced Current

Grazzi, C., Albrecht, M., Strunk, Horst P., Bougrioua, Z., Moerman, I.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 535 KB

2002

51

Kinetics of Surface Processes and Mechanisms of Alloy Intermixing Near Interfaces in Si(Ge)/Si1-xGex Structures Grown by Molecular Beam Epitaxy with Combined Sources

Orlov, L.K., Ivina, N.L.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 364 KB

english, 2002

52

SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition

Ventola, Stefano, Fort, Julien, La Spada, Francesco, Maniscalco, Paolo

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 403 KB

2002

53

Dopant Segregation on Cavities Induced by Helium Implantation: The Case of Boron and Phosphorus

Cayrel, Frédéric, Alquier, Daniel, Roqueta, F., Ventura, Laurent, Dubois, Christiane, Jérisian, Robert, Mathiot, D.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 549 KB

2002

54

Phonon-Plasmon Interaction in Tunnelling GaAs/AlAs Superlattices Grown on (311) and (100) Substrates

Efremov, M.D., Volodin, V.A., Sachkov, V.A., Preobrazhenski, V.V., Semyagin, B.R., Ledentsov, N.N., Ustinov, V.M., Litvinov, D., Gerthsen, D.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 382 KB

2002

55

Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon

Ulyashin, Alexander G., Job, Reinhart, Fahrner, Wolfgang R., Grambole, Dieter, Herrmann, Folker

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 392 KB

2002

56

Spectroscopic Characterisation of Erbium Impurity in Crystalline Silicon

Ammerlaan, C.A.J., de Maat-Gersdorf, Ingrid

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 396 KB

2002

57

Positron Annihilation Studies of Oxygen Precipitation in Silicon and of Nano-Precipitates in Si-Rich SiO2 Films: Role of Vacancy-Like Defects

Brusa, Roberto S., Deng, W., Karwasz, Grzegorz P., Zecca, Antonio

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 485 KB

english, 2002

58

Influence of Ge Content on Electrical Properties: Sheet Resistance and Hall Mobility in Ion Beam Synthesized Si1-xGex Alloy

Cerrina, C., Nejim, A., Wang, Y., Hemment, P.L.F.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 472 KB

2002

59

Optical Properties of Oxygen Agglomerates in Silicon

Binetti, Simona, Pizzini, Sergio, Leoni, E., Somaschini, R., Castaldini, Antonio, Cavallini, Anna

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 354 KB

2002

60

Application of Gate Oxide Integrity to the Evaluation of the Efficiency of Internal and External Gettering Sites in Si Wafers

Koveshnikov, Sergei V., Beauchaine, David, Radzimski, Zbigniew J., Ling, Li, Ravi, K.V.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 461 KB

2002

61

Structure and Stability of Thin Praseodymium Oxide Layers on Si(001)

Müssig, Hans Joachim, Dąbrowski, Jaroslaw, Ignatovich, K., Liu, J.P., Zavodinsky, V., Osten, H.J.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 682 KB

2002

62

Defect Engineering and Prevention of Impurity Gettering at RP/2 in Ion-Implanted Silicon

Kögler, R., Peeva, A., Kaschny, J., Skorupa, Wolfgang, Hutter, H.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 494 KB

2002

63

Proton Irradiation Effects on Standard and Oxygenated Silicon Diodes

Bisello, D., Bacchetta, N., Candelori, A., Kaminski, A., Pantano, D., Rando, R., Stavitski, I., Wyss, J.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 378 KB

2002

64

Monitoring of Defects in Thermal Oxides during Electrical Stress

Caputo, Domenico, Irrera, Fernanda, Palma, Fabrizio

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 458 KB

2002

65

A Technique for Delineating Defects in Silicon

Mule'Stagno, Luciano

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 889 KB

2002

66

On the Properties of Divacancies in Si1-xGex

Khirunenko, L.I., Pomozov, Yu.V., Sosnin, M.G., Abrosimov, N.V., Schröder, W.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 347 KB

2002

67

Self-Interstitial Kinetics and Transient Phenomena in Si Crystals

La Magna, Antonino, Coffa, Salvatore, Libertino, Sebania, Strobel, Matthias, Colombo, Luciano

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 450 KB

2002

68

Effect of Selective Doping on Photo- and Electroluminescence Efficiency in Si:Er Structures

Stepikhova, Margarita, Andreev, B., Kuznetsov, V.D., Krasil'nik, Z.F., Soldatkin, A., Shmagin, V., Bresler, M.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 454 KB

english, 2002

69

Luminescence from Si Nanocrystals and Er3+ Ions Embedded in Resonant Cavities

Iacona, F., Franzò, G., Moreira, E.C., Pacifici, D., Priolo, F.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 407 KB

2002

70

Temporal Characteristics of the Optical Storage Effect in Si:Er

Forcales, M., Bradley, I.V., Wells, J.-P.R., Gregorkiewicz, T.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 338 KB

2002

71

Radiation-Stimulated Ordering Effect in CdS Crystals

Pavlyk, B., Tsybulyak, B., Klochan, O.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 318 KB

2002

72

The Laser-Stimulated Modification of the Surfaces of Polycrystalline CdTe Layers

Baidullaeva, A., Mozol, P.E., Vlasenko, A.I.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 490 KB

2002

73

Nucleation of Nanostructures from Surface Defects on Silicon

Palermo, V., Jones, D.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 428 KB

2002

74

Lock-In IR-Thermography – A Novel Tool for Material and Device Characterization

Huth, S., Breitenstein, O., Huber, A., Dantz, D., Lambert, U., Altmann, F.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 455 KB

2002

75

Internal Gettering in Silicon: Experimental and Theoretical Studies Based on Fast and Slow Diffusing Metals

Geranzani, P., Pagani, M., Pello, C., Borionetti, G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 365 KB

2002

76

Strain Characterisation at the nm Scale of Deep Sub-Micron Devices by Convergent-Beam Electron Diffraction

Armigliato, A., Balboni, R., Benedetti, A., Carnevale, G.P., Cullis, A.G., Frabboni, S., Piccolo, D.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 649 KB

english, 2002

77

Impact of a Cooling Process on the Dopant Activity of Platinum in Silicon

Ventura, Laurent, Pichaud, Bernard, Lanois, Frédéric

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 400 KB

2002

78

Structural and Photoluminescence Properties of H+ Ion-Implanted Silicon-on-Insulator Structures Formed by Hydrogen Slicing

Tyschenko, I.E., Talochkin, A.B., Zhuravlev, K.S., Obodnikov, V.I., Popov, V.P.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 342 KB

2002

79

Silicon Nanoclusters in Thermal Oxide Films on Silicon

Zamoryanskaya, M.V., Sokolov, V.I.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 288 KB

2002

80

Gate-Oxide Integrity Evaluation Using Non-Ideal Metal-Oxide-Silicon Capacitor Structures

Mchedlidze, Teimuraz

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 476 KB

2002

81

Structural Investigations of Praseodymium Oxide Epitaxially Grown on Silicon

Zaumseil, P., Bugiel, E., Liu, J.P., Osten, H.J.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 561 KB

2002

82

Charge Relaxation at Oxygen-Enriched Silicon Grain Boundaries

Fedotov, A.K., Mazanik, A.V., Ulyashin, Alexander G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 422 KB

2002

83

Ultra Low-Level Ion Implantation Damage Detected by p-n Junctions Biased above Breakdown

Sciacca, E., Lombardo, Salvatore, Patti, D., Sanfillippo, D., Di Franco, C., Ghioni, M., Zappa, F., Rimini, Emanuele, Cova, S.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 505 KB

english, 2002

84

Characterization of SiC Grown on Si(111) by Supersonic C60 Beams

Aversa, L., Verucchi, R., Ciullo, G., Boschetti, A., Ferrari, L., Moras, P., Pedio, M., Pesci, A., Iannotta, S.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 396 KB

2002

85

Ellipsometric Study of Ion-Implantation Damage in Single-Crystal Silicon - An Advanced Optical Model

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N.Q., Gyulai, J.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 392 KB

2002

86

Copper-Defect and Copper-Impurity Interactions in Silicon

Estreicher, Stefan K., West, D., Ordejón, P.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 556 KB

english, 2002

87

Hydrogen-Related Phenomena in SOI Fabricated by Using H+-Ion Implantation

Antonova, I.V., Nikolaev, D.V., Naumova, O.V., Popov, V.P.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 374 KB

2002

88

Atomistic Study of Boron Clustering in Silicon

Alippi, Paola, Ruggerone, Paolo, Colombo, Luciano

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 493 KB

2002

89

Elastic Instability of Strained Spherical Precipitates as a Cause of Oxide Platelets in Silicon

Voronkov, Vladimir, Falster, Robert

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 408 KB

2002

90

On the Mechanism of Defect Suppression in Nitrogen-Doped Silicon Single Crystals

von Ammon, Wilfried, Hölzl, Robert, Virbulis, J., Dornberger, E., Schmolke, R., Gräf, D.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 576 KB

english, 2002

91

A Study of the Conversion of the VO to the VO2 Defect in Heat-Treated Silicon under Stress

Londos, Charalamos A., Potsidou, M., Misiuk, Andrzej, Antonova, I.V.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 333 KB

2002

92

1D-ACAR Studies of As-Grown Impurity Centers in Silicon

Arutyunov, N.Yu., Trashchakov, V.Yu.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 468 KB

2002

93

Silicon Wafer Requirements for ULSI Device Processing

Illuzzi, Francesca

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 377 KB

2002

94

Study of the Effect of Carrier Cross-Sections, on the Leakage Current of Irradiated Silicon Detectors, using the Exchange Charge Model

Saramad, S., Moussavi-Zarandi, A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 348 KB

2002

95

Spatial Distribution of Strain and Phases in Si Nano-Indentation Analysed by Raman Mapping

Demangeot, F., Puech, P., Paillard, V., Domnich, V., Gogotsi, Yu.G.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 411 KB

2002

96

Memory Effects in Single-Electron Nanostructures

Crupi, I., Lombardo, Salvatore, Gerardi, C., Ammendola, G., Vulpio, M., Rimini, Emanuele, Melanotte, M.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 274 KB

2002

97

Evaluation of Effective Carrier Lifetime in Epitaxial Silicon Layers

Väinölä, Hele, Storgårds, J., Yli-Koski, Marko, Sinkkonen, Juha

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 387 KB

2002

98

Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching

Parakhonsky, A.L., Yakimov, E.B., Yang, De Ren

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 379 KB

2002

99

Impact of Compressive Stress on the Formation of Thermal Donors in Heat-Treated Silicon

Misiuk, Andrzej, Andreev, Boris A., Emtsev, Valentin V., Londos, Charalamos A., Oganesyan, Gagik A., Poloskin, D.S.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 365 KB

2002

100

Incorporation, Diffusion and Agglomeration of Carbon in Silicon

Lavéant, P., Werner, P., Gerth, G., Gösele, U.M.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 625 KB

2002

101

Effects of Pulsed Electron Beam Annealing on Radiation Damage in N Doped a-SiC:H Films Deposited by PECVD

Huran, J., Hotový, I., Staňo, J., Kobzev, A.P., Balalykin, N.I.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 296 KB

2002

102

Effect of Heavy Carbon, Nitrogen and Boron Doping on Oxygen Precipitation Behavior in Silicon Epitaxial Wafers

Sueoka, K., Akatsuka, M., Yonemura, Mitsuharu, Ono, T., Asayama, Eiichi, Koike, Y., Sadamitsu, S.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 595 KB

english, 2002

103

Room Temperature Point Defect Migration in Crystalline Si

Libertino, Sebania, Coffa, Salvatore

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 493 KB

2002

104

Dependence of the Transient Enhanced Diffusion, of B in Si, upon B Concentration and Ion Implanted Dose

Solmi, Sandro, Mannino, G., Servidori, Marco, Bersani, M., Mancini, L., Milita, S., Privitera, Vittorio, Anderle, M.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 495 KB

2002

105

Interstitial Diffusion Influence upon Two-Dimensional Boron Profiles

Giannazzo, Filippo, Raineri, Vito, Privitera, Vittorio, Priolo, F.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 456 KB

2002

106

Excitation Cross-Section of Erbium in Semiconductor Matrices under Optical Pumping

Gusev, O.B., Bresler, M.S., Pak, P.E., Yassievich, I.N., Forcales, M., Vinh, N.Q., Gregorkiewicz, T.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 369 KB

2002

107

Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing

Müller, Timo, Obermeier, G., Bearda, T., Huber, A., Schmolke, R., von Ammon, Wilfried, Lerch, Wilfried

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 442 KB

2002

108

Thermal Donors in Silicon Implanted with Rare Earth Impurities

Emtsev, Valentin V., Ammerlaan, C.A.J., Andreev, Boris A., Oganesyan, Gagik A., Poloskin, D.S., Shek, E.I., Sobolev, N.A.

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 357 KB

english, 2002

109

Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon

Job, Reinhart, Ulyashin, Alexander G., Fahrner, Wolfgang R.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 480 KB

2002

110

Passivation of Al/Si Interface by Chemical Treatment: Schottky Barrier Height and Plasma Etch Induced Defects

Horváth, Zsolt E., Ádám, M., Godio, P., Borionetti, G., Szabó, I.A., Gombia, E., Van Tuyen, Vo

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 314 KB

2002

111

Nickel Gettering in Silicon: Role of Oxygen

Regula, G., El Bouayadi, R., Pichaud, Bernard, Ntsoenzok, E.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 672 KB

2002

112

Self-Orientation of Silicon Nanocrystals Created under Pulse Laser Impact in Stressed α-Si:H Films on Glass Substrates

Efremov, M.D., Volodin, V.A., Bolotov, V.V., Kretinin, A.V., Gutakovskii, Anton K., Fedina, Liudmila I., Kochubei, S.A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 388 KB

2002

113

Measurement of the Normalized Recombination Strength of Dislocations in Multicrystalline Silicon Solar Cells

Rinio, Markus, Peters, Stefan, Werner, Martina, Lawerenz, Alexander, Möller, Hans Joachim

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 643 KB

2002

114

Cavities in He-Implanted SiC

Barbot, Jean François, Oliviero, Erwan, David, Marie-Laure, Declémy, Alain, Blanchard, C., Beaufort, Marie France, van Veen, A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 527 KB

2002

115

Defects Created by Helium Implantation at Different Temperatures in Silicon

David, Marie-Laure, Oliviero, Erwan, Ratchenkova, A., Gerasimenko, Nikolai N., Declémy, Alain, Barbot, Jean François, van Veen, A., Beaufort, Marie France

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 483 KB

2002

116

Platinum Silicide Precipitate Formation During Phosphorus Diffusion Gettering in Silicon

Seibt, Michael, Döller, A., Kveder, Vitaly, Sattler, Andreas, Zozime, A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 566 KB

2002

117

Stress-Induced Redistribution of Point Defects in Silicon Device Structures

Loiko, K.V., Peidous, I.V., Harrington, T.E., Frensley, W.R.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 489 KB

2002

118

Characterization of Interstitial-Related Bulk Defects in p- Silicon Substrates by Epitaxial Deposition

Schmolke, R., Angelberger, W., von Ammon, Wilfried, Bender, H.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 533 KB

2002

119

Recombination Lifetimes of Iron-Contaminated Silicon Wafers: Characterization Using a Single Set of Capture Cross-Sections

Rommel, M., Zoth, G., Ullrich, M., Ryssel, Heiner

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 563 KB

english, 2002

120

The Structure and Photoluminescence of Erbium-Doped Nanocrystalline Silicon Thin Films Produced by Reactive Magnetron Sputtering

Cerqueira, M.Fátima, Losurdo, Maria, Stepikhova, M.V., Conde, Olinda, Giangregorio, M.M., Pinto, Pedro, Ferreira, João Alves

Journal:

Solid State Phenomena

Year:

2002

Language:

english

File:

PDF, 487 KB

english, 2002

121

Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon

Kamaev, G.N., Bolotov, V.V., Chern'aev, S.A., Efremov, M.D.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 315 KB

2002

122

Hydrogen-Induced Shallow Donors in Silicon and Silicon-on-Insulator Structures Formed by Hydrogen Slicing

Popov, V.P., Kilanov, D.V., Antonova, I.V., Naumova, O.V., Stepovik, A.P., Gromov, V.T., Misiuk, Andrzej

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 410 KB

2002

123

Defect-Related Current Instabilities in InAs/GaAs and AlGaAs/GaAs Structures?

Horváth, Zsolt E., Franchi, S., Bosacchi, A., Frigeri, P., Gombia, E., Mosca, R., Van Tuyen, Vo

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 277 KB

2002

124

Electroluminescence of Si Quantum Dots in MOS Structures

Irrera, A., Franzò, G., Iacona, F., Moreira, E.C., Priolo, F.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 427 KB

2002

125

Nanocrystal MOS with Silicon-Rich Oxide

Crupi, I., Lombardo, Salvatore, Gerardi, C., Fazio, B., Vulpio, M., Rimini, Emanuele, Melanotte, M.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 308 KB

2002

126

Segregation of Mg Implanted into InAs: Influence of the Internal Elastic Stresses

Velichko, O.I., Dobrushkin, V.A., Fedotov, A.K., Tsurko, V.A.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 362 KB

2002

127

The Effect of Intrinsic Point Defects upon Dislocation Motion in Silicon

Peidous, I.V., Loiko, K.V., Simpson, D.A., Frensley, W.R., Huff, Howard R.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 639 KB

2002

128

p-n Junction Leakage in Neutron-Irradiated Diodes Fabricated in Various Silicon Substrates

Czerwinski, A., Simoen, Eddy, Poyai, A., Claeys, C., Ohyama, H.

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 422 KB

2002

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