Fabrication of self-aligned 90-nm fully depleted SOI CMOS...

IEEE Electron Device Letters 2001 / 07 Vol. 22; Iss. 7

Fabrication of self-aligned 90-nm fully depleted SOI CMOS SLOTFETs

Chen, C.K., Chen, C.L., Gouker, P.W., Wyatt, P.W., Yost, D.R., Burns, J.A., Suntharalingam, V., Fritze, M., Keast, L.
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Volume:
22
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.930686
Date:
July, 2001
File:
PDF, 259 KB
english, 2001
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