A Gate-Dielectric-Last Process via Photosolidification of...

IEEE Electron Device Letters 2012 / 06 Vol. 33; Iss. 6

A Gate-Dielectric-Last Process via Photosolidification of Liquid Resin

Han, Jin-Woo, Choi, Yang-Kyu, Meyyappan, M.
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Volume:
33
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2012.2189866
Date:
June, 2012
File:
PDF, 303 KB
english, 2012
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