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Scaling Laws for Opening Partially Adhered Contacts in MEMS
Decuzzi, P., Srolovitz, D.J.Volume:
13
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2004.824889
Date:
April, 2004
File:
PDF, 314 KB
english, 2004