A novel germanium doping method for fabrication of...

IEEE Electron Device Letters 2003 / 04 Vol. 24; Iss. 4

A novel germanium doping method for fabrication of high-performance p-channel poly-Si1-xGex TFT by excimer laser crystallization

Ting-Kuo Chang,, Fang-Tsun Chu,, Ching-Wei Lin,, Chang-Ho Tseng,, Huang-Chung Cheng,
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Volume:
24
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/tcsi.2003.811423
Date:
April, 2003
File:
PDF, 352 KB
english, 2003
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