![](/img/cover-not-exists.png)
The observation of deep donor levels in epitaxially regrown implanted silicon
S.D. Brotherton, P. Bradley, A. GillVolume:
129
Year:
1985
Language:
english
Pages:
5
DOI:
10.1016/0378-4363(85)90562-5
File:
PDF, 257 KB
english, 1985