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Characterization of TaSi2-films prepared by sputtering from compound targets
H. Gant, H. Boetticher, B. Kornetke, H.R. DeppeVolume:
129
Year:
1985
Language:
english
Pages:
4
DOI:
10.1016/0378-4363(85)90568-6
File:
PDF, 285 KB
english, 1985