![](/img/cover-not-exists.png)
Platinum silicide shallow contacts for CMOS integrated circuits
P Maguire, B Armstrong, H Gamble, J WakefieldVolume:
129
Year:
1985
Language:
english
Pages:
4
DOI:
10.1016/0378-4363(85)90569-8
File:
PDF, 253 KB
english, 1985