Platinum silicide shallow contacts for CMOS integrated...

Platinum silicide shallow contacts for CMOS integrated circuits

P Maguire, B Armstrong, H Gamble, J Wakefield
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Volume:
129
Year:
1985
Language:
english
Pages:
4
DOI:
10.1016/0378-4363(85)90569-8
File:
PDF, 253 KB
english, 1985
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