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Formation of palladium and titanium silicides by rapid thermal annealing
D. Levy, J.P. Ponpon, A. Grob, J.J. Grob, P. SiffertVolume:
129
Year:
1985
Language:
english
Pages:
5
DOI:
10.1016/0378-4363(85)90570-4
File:
PDF, 287 KB
english, 1985