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Influence of stoechiometry and hydrogen bonding on the insulating properties of PECVD silicon nitride
C. Chaussat, E. Bustarret, J.C. Bruyere, R. GroleauVolume:
129
Year:
1985
Language:
english
Pages:
5
DOI:
10.1016/0378-4363(85)90572-8
File:
PDF, 238 KB
english, 1985