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Bombardment Induced Strengthening Of Nitride (BISON) a novel effect in the etch properties of ion implanted LPCVD - Si3N4
A.H. van Ommen, H.G.R. Maas, J.A. AppelsVolume:
129
Year:
1985
Language:
english
Pages:
4
DOI:
10.1016/0378-4363(85)90573-x
File:
PDF, 146 KB
english, 1985