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Temperature dependence and non-uniformity of electrical properties of SOI films obtained by oxygen implantation
S. Cristoloveanu, J. Wyncoll, P. Spinelli, P.L.F. Hemment, R.P. ArrowsmithVolume:
129
Year:
1985
Language:
english
Pages:
6
DOI:
10.1016/0378-4363(85)90579-0
File:
PDF, 299 KB
english, 1985