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Influence of Al-poly Si interactions on electrical properties of MOS capacitors
M. Dutoit, P. Weiss, J. Sanchez, M. Pfister, J.M. MoretVolume:
129
Year:
1985
Language:
english
Pages:
5
DOI:
10.1016/0378-4363(85)90580-7
File:
PDF, 331 KB
english, 1985