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Titanium-Substituted $\hbox{Bi}_{1.5}\hbox{Zn}_{1.0} \hbox{Nb}_{1.5}\hbox{O}_{7}$ for High-Density and Low-Temperature-Coefficient-of-Capacitance MIM Capacitor by Low-Temperature Process (300 $^{\circ}\hbox{C}$)
Kwang-Hwan Cho,, Min-Gyu Kang,, Chong-Yun Kang,, Seok-Jin Yoon,, YoungPak Lee,Volume:
31
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2043212
Date:
May, 2010
File:
PDF, 363 KB
english, 2010