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${\rm HfO}_{2}$ Based High-$k$ Inter-Gate Dielectrics for Planar NAND Flash Memory
Breuil, Laurent, Lisoni, Judit G., Blomme, Pieter, Van den Bosch, Geert, Van Houdt, JanVolume:
35
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2290053
Date:
January, 2014
File:
PDF, 549 KB
english, 2014