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Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages
Harpster, T.J., Nikles, S.A., Dokmeci, M.R., Najafi, K.Volume:
5
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2005.854374
Date:
September, 2005
File:
PDF, 825 KB
english, 2005