Photoelectrochemical plating of via GaAs FET's

Photoelectrochemical plating of via GaAs FET's

Kohl, P.A., D'Asaro, L.A., Wolowodiuk, C., Ostermayer, F.W.
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Volume:
5
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/edl.1984.25811
Date:
January, 1984
File:
PDF, 403 KB
english, 1984
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