Temperature distribution in semiconductor wafers heated in...

IEEE Transactions on Semiconductor Manufacturing 1993 / Aug. Vol. 6; Iss. 3

Temperature distribution in semiconductor wafers heated in a vertical diffusion furnace

Hirasawa, S., Kieda, S., Watanabe, T., Torii, T., Takagaki, T., Uchino, T.
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Volume:
6
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.238170
Date:
January, 1993
File:
PDF, 670 KB
english, 1993
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