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Effects of growth conditions and RF plasma on crystalline and electrical properties of SrBi 2 Ta 2 O 9 thin films grown by liquid delivery MOCVD using a double alcoholate
Jimbo, T., Sano, H., Takahashi, Y., Funakubo, H., Tokumitsu, E., Ishiwara, H.Volume:
26
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589908215616
Date:
October, 1999
File:
PDF, 329 KB
english, 1999