Transistor characteristics with Ta/sub 2/O/sub 5/ gate...

IEEE Electron Device Letters 1998 / 11 Vol. 19; Iss. 11

Transistor characteristics with Ta/sub 2/O/sub 5/ gate dielectric

Donggun Park,, Ya-chin King,, Qiang Lu,, Tsu-Jae King,, Chenming Hu,, Kalnitsky, A., Sing-Pin Tay,, Chia-Cheng Cheng,
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Volume:
19
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.728906
Date:
November, 1998
File:
PDF, 71 KB
english, 1998
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