A taper angle control technique using thin-film layer stiction phenomenon
Kim, Youngseok, Heo, Eunah, Lee, HojinVolume:
571
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.10.075
Date:
November, 2014
File:
PDF, 2.52 MB
english, 2014