A taper angle control technique using thin-film layer...

A taper angle control technique using thin-film layer stiction phenomenon

Kim, Youngseok, Heo, Eunah, Lee, Hojin
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Volume:
571
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.10.075
Date:
November, 2014
File:
PDF, 2.52 MB
english, 2014
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