An electrohydrodynamic polarization micropump for...

Journal of Microelectromechanical Systems 2001 / 3 Vol. 10; Iss. 1

An electrohydrodynamic polarization micropump for electronic cooling

Darabi, J., Ohadi, M.M., DeVoe, D.
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Volume:
10
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.911097
Date:
March, 2001
File:
PDF, 290 KB
english, 2001
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