Volume 10; Issue 1

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Journal of Microelectromechanical Systems
Volume 10; Issue 1

Journal of Microelectromechanical Systems

Volume 10; Issue 1

1

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Ashurst, W.R., Yau, C., Carraro, C., Maboudian, R., Dugger, M.T.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 479 KB

english, 2001

2

A contact-type piezoresistive micro-shear stress sensor for above-knee prosthesis application

Ming Chun Hsieh, Yean Kuen Fang, Ming-Shaung Ju, Gin-Shin Chen, Jyh-Jier Ho, Yang, C.H., Pei Ming Wu, Wu, G.S., Terry Yuan-Fang Chen

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 146 KB

english, 2001

3

Silicon micromachining using in situ DC microplasmas

Wilson, C.G., Gianchandani, Y.B.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 113 KB

english, 2001

4

Micromachined electrodes for biopotential measurements

Griss, P., Enoksson, P., Tolvanen-Laakso, H.K., Merilainen, P., Ollmar, S., Stemme, G.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 151 KB

english, 2001

5

Silicon carbide micro-reaction-sintering using micromachined silicon molds

S. Tanaka, S. Sugimoto, J. Li, R. Watanabe, M. Esashi

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 225 KB

english, 2001

6

A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS

C. Shih, B. Lai, H. Kahn, S. Phillips, A. Heuer

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 281 KB

english, 2001

7

Microscale materials testing using MEMS actuators

Haque, M.A., Saif, M.T.A.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 255 KB

english, 2001

8

Forced convection boiling in a microchannel heat sink

Linan Jiang,, Man Wong,, Yitshak Zohar,

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 298 KB

english, 2001

9

Analysis of the dynamics in microactuators using high-speed cine photomicrography

Rembe, C., Tibken, B., Hofer, E.P.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 236 KB

english, 2001

10

Microstructure to substrate self-assembly using capillary forces

Srinivasan, U., Liepmann, D., Howe, R.T.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 206 KB

english, 2001

11

Laterally driven electrostatic repulsive-force microactuators using asymmetric field distribution

Ki Bang Lee,, Young-Ho Cho,

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 277 KB

english, 2001

12

Fabrication of metallic heat exchangers using sacrificial polymer mandrils

Arias, F., Oliver, S.R.J., Xu, B., Holmlin, R.E., Whitesides, G.M.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 136 KB

english, 2001

13

New optomechanical technique for measuring layer thickness in MEMS processes

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 170 KB

english, 2001

14

A new organic modifier for anti-stiction

Bong Hwan Kim,, Taek Dong Chung,, Chang Hoon Oh,, Kukjin Chun,

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 302 KB

english, 2001

15

Fabrication and mechanical performance of a mesoscale space-filling truss system

Brittain, S.T., Sugimura, Y., Schueller, O.J.A., Evans, A.G., Whitesides, G.M.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 255 KB

english, 2001

16

Batch transfer of LIGA microstructures by selective electroplating and bonding

Pan, L.-W., Lin, L.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 274 KB

english, 2001

17

Failure mechanisms of pressurized microchannels: model and experiments

Blom, M.T., Tas, N.R., Pandraud, G., Chmela, E., Gardeniers, J.G.E., Tijssen, R., Elwenspoek, M., van den Berg, A.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 130 KB

english, 2001

18

An electrohydrodynamic polarization micropump for electronic cooling

Darabi, J., Ohadi, M.M., DeVoe, D.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 290 KB

english, 2001

19

Surface micromachined polyimide scanning thermocouple probes

Li, M.-H., Wu, J.J., Gianchandani, Y.B.

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 160 KB

english, 2001

20

Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique

Ren-Haw Chen,, Chih-Lung Lan,

Journal:

Journal of Microelectromechanical Systems

Year:

2001

Language:

english

File:

PDF, 143 KB

english, 2001

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