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Charged species dynamics in an inductively coupled Ar/SF[sub 6] plasma discharge
Rauf, Shahid, Ventzek, Peter L. G., Abraham, Ion C., Hebner, Gregory A., Woodworth, Joseph R.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1519950
File:
PDF, 381 KB
english, 2002