Raman imaging of stress in a SiGe/Si photoelastic optical...

Raman imaging of stress in a SiGe/Si photoelastic optical channel waveguide structure

Rho, H., Jackson, Howard E., Weiss, B. L.
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Volume:
75
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.124670
File:
PDF, 520 KB
english, 1999
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