Nitrogen and fluorine ion implantation in InxGa1−xN

Applied Physics Letters 1995 Vol. 66; Iss. 22

Nitrogen and fluorine ion implantation in InxGa1−xN

Zolper, J. C., Pearton, S. J., Abernathy, C. R., Vartuli, C. B.
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Volume:
66
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.114271
File:
PDF, 316 KB
english, 1995
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