Study on Characteristics of Poly-Si TFTs With 3-D Finlike Channels Fabricated by Nanoimprint Technology
Chen, Henry J. H., Jhang, Jia-Rong, Huang, Chien-JenVolume:
59
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2012.2202286
Date:
September, 2012
File:
PDF, 514 KB
english, 2012