Analysis of lateral uniformity of ultrashallow junctions in...

Applied Physics Letters 1991 Vol. 59; Iss. 6

Analysis of lateral uniformity of ultrashallow junctions in polycrystalline silicon-on-single crystal silicon systems

Park, Keunhyung, Batra, Shubneesh, Banerjee, Sanjay
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Volume:
59
Year:
1991
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.105372
File:
PDF, 627 KB
english, 1991
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