New group III aluminium and gallium hydride precursors for...

New group III aluminium and gallium hydride precursors for metal-organic vapour-phase epitaxy

R. Dorn, M. Müller, J. Lorbeth, G. Zimmermann, H. Protzmann, W. Stolz, E.O. Göbel
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Volume:
17
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(93)90076-y
File:
PDF, 327 KB
english, 1993
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