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Etching of copper and copper oxide at high rates via generation of volatile copper species
J. Farkas, K.-M. Chi, M.J. Hampden-Smith, T.T. Kodas, L.H. DuboisVolume:
17
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(93)90086-3
File:
PDF, 397 KB
english, 1993