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Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors
C.I.M.A. Spee, F. Verbeek, J.G. Kraaijkamp, J.L. Linden, T. Rutten, H. Delhaye, E.A. van der Zouwen, H.A. MeinemaVolume:
17
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0921-5107(93)90090-a
File:
PDF, 358 KB
english, 1993