Chemical vapour deposition of tungsten in a UHV system:...

Materials Science and Engineering: B 1993 Vol. 17; Iss. 1-3

Chemical vapour deposition of tungsten in a UHV system: effect of substrate conditions on the initial stages of growth

Ulf Jansson, Jan-Otto Carlsson
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Volume:
17
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0921-5107(93)90094-4
File:
PDF, 591 KB
english, 1993
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