Growth kinetics and properties of dielectric films...

Growth kinetics and properties of dielectric films synthesized by low pressure chemical vapor deposition from diethylsilane

Roland A. Levy, James M. Grow
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Volume:
17
Year:
1993
Language:
english
Pages:
9
DOI:
10.1016/0921-5107(93)90101-r
File:
PDF, 972 KB
english, 1993
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