Silicon nitride elaborated by low pressure chemical vapour...

Silicon nitride elaborated by low pressure chemical vapour deposition from Si2H6 and NH3 at low temperature

E. Scheid, L.K. Kouassi, R. Henda, J. Samitier, J.R. Morante
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Volume:
17
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0921-5107(93)90103-t
File:
PDF, 426 KB
english, 1993
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