Silicon pressure sensor with integrated CMOS...

Sensors and Actuators A: Physical 1990 Vol. 25; Iss. 1-3

Silicon pressure sensor with integrated CMOS signal-conditioning circuit and compensation of temperature coefficient

H.-J. Kress, F. Bantien, J. Marek, M. Willmann
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Volume:
25
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(90)87004-3
File:
PDF, 722 KB
english, 1990
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