Volume 25; Issue 1-3

Sensors and Actuators A: Physical

Volume 25; Issue 1-3

1

NH4OH-based etchants for silicon micromachining: Influence of additives and stability of passivation layers

U. Schnakenberg, W. Benecke, B. Löchel, S. Ullerich, P. Lange

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 728 KB

english, 1990

2

Micromachining with focused ion beams

R. Clampitt, P.W. Mingay, S.T. Davies

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 2.15 MB

english, 1990

3

Silicon pressure sensor with integrated CMOS signal-conditioning circuit and compensation of temperature coefficient

H.-J. Kress, F. Bantien, J. Marek, M. Willmann

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 722 KB

english, 1990

4

On-line optimization in sensor frequency response compensation

W.J. Shi, J.E. Brignell

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 400 KB

english, 1990

5

Sensor electronics using pseudo-random discrete signals: Features and problems of a new strategy

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 299 KB

english, 1990

6

Packaging and interconnection of sensors

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 679 KB

english, 1990

7

Reliability and fault tolerance of low-cost multipoint sensor interfaces

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 450 KB

english, 1990

8

A miniaturized high-temperature pressure sensor for the combustion chamber of a spark ignition engine

R. Mock, H. Meixner

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 318 KB

english, 1990

9

Bus systems

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 734 KB

english, 1990

10

Sinec concept and implementation

K. Becker, E. Flaschka

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 220 KB

english, 1990

11

State of the development of a fieldbus chip

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 283 KB

english, 1990

12

BiCMOS bus interface logic for advanced system applications

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 357 KB

english, 1990

13

M-Bus, a bus concept for battery operated meters

Brenninger Heinrich

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 432 KB

english, 1990

14

Infrared detection, some recent developments and future trends

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 764 KB

english, 1990

15

Integrated optical sensors based on reactive low-voltage ion-plated films

R.E. Kunz, C.L. Du, J. Edlinger, H.K. Pulker, M. Seifert

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 474 KB

english, 1990

16

Fast field sensing with photodiode arrays

W. Heering, M. Brandenbusch

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 409 KB

english, 1990

17

Photodiodes in epitaxial laterally overgrown silicon for image sensors in 3D-technology

P. Vöhringer, W. Appel, G. Graf, B. Höfflinger, R. Zingg

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 665 KB

english, 1990

18

Input and output grating couplers as integrated optical biosensors

W. Lukosz, D. Clerc, Ph.M. Nellen

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 349 KB

english, 1990

19

Integrated optical interferometer as relative humidity sensor and differential refractometer

W. Lukosz, Ch. Stamm

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 335 KB

english, 1990

20

Optical fibres for sensors

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 526 KB

english, 1990

21

An optical fibre displacement sensor with extended range using two-wavelength referencing

X.P. Liu, R.C. Spooncer, B.E. Jones

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 303 KB

english, 1990

22

An all-optical single-fibre micromachined silicon resonant sensor: Towards a commercial device

D.R. Vincent, J.N. Ross

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 299 KB

english, 1990

23

Improved design for a fibre-optic shock-wave sensor

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 514 KB

english, 1990

24

Optical fiber flowmeter with temperature correction

J.P. Herzog, P. Roth, P. Meyrueis

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 379 KB

english, 1990

25

Thick-film technology

Maria Prudenziati

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 868 KB

english, 1990

26

A laser power detector built up by application of thick-film technology

Johann Nicolics, Walter Smetana

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 356 KB

english, 1990

27

Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH

H.L. Offereins, K. Kühl, H. Sandmaier

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 1.22 MB

english, 1990

28

Software techniques for sensor compensation

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 635 KB

english, 1990

29

Sensor fault detection and localization using decorrelation methods

K. Kroschel, A. Wernz

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 587 KB

english, 1990

30

Statistical analysis evaluation of a multisensor system

F. Betancourt, L.J. Barrios, D. Guinea, A. Ruiz, S. Ros

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 353 KB

english, 1990

31

Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

Harrie A.C. Tilmans, Siebe Bouwstra, Jan H.J. Fluitman, Scott L. Spence

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 735 KB

english, 1990

32

Silicon direct bonding for sensor applications: Characterization of the bond quality

Christine Harendt, Bernd Hofflinger, Heinz-Gerd Graf, Elisabeth Penteker

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 1.29 MB

english, 1990

33

Sensors as key components for automotive systems

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 1.55 MB

english, 1990

34

Progress in fieldbus developments for measuring and control applications

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 391 KB

english, 1990

35

The Token Bus Modem

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 439 KB

english, 1990

36

Pyroelectric detector array with PVDF on silicon integrated circuit

W.V. Münch, U. Thiemann

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 706 KB

english, 1990

37

Fiber-optic displacement sensor with 0.02 μm resolution by white-light interferometry

Andreas Koch, Reinhard Ulrich

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 604 KB

english, 1990

38

Three-dimensional modelling of capacitive humidity sensors

Leena Chandran, Henry Baltes, Jan Korvink

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 421 KB

english, 1990