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Residual stress and mechanical properties of boron-doped p+-silicon films
Xiaoyi Ding, Wen H. Ko, Joseph M. MansourVolume:
23
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(90)87048-n
File:
PDF, 662 KB
english, 1990